in this paper, a robust pid control scheme is proposed for micro-electro-mechanical-systems(mems) optical switches. the proposed approach is designed in a way which solves twochallenging and important problems. the first one is successful reference tracking and the second ismitigating the system nonlinearities. the overall system composed of nonlinear mems dynamicsand the pid controller is prov...

this paper addresses the problem of the fractional sliding mode control (fsmc) for a mems optical switch. the proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. after a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

in this paper, an adaptive neuro fuzzy inference system (anfis) based control is proposed for the tracking of a micro-electro mechanical systems (mems) gyroscope sensor. the anfis is used to train parameters of the controller for tracking a desired trajectory. numerical simulations for a mems gyroscope are looked into to check the effectiveness of the anfis control scheme. it proves that the sy...

this paper presents a comprehensive case study on electro-mechanical analysis of mems[1] variable capacitors. using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. the analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. a complete set of equations defining dynamic behavior of ...

We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scann...

This paper presents a comprehensive case study on electro-mechanical analysis of MEMS[1] variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of ...

MEMS is the acronym for Micro Electro Mechanical Systems. Micromachining has potential applications for large area image sensors and displays, but conventional MEMS technology, based on crystalline silicon wafers cannot be used. Instead, large area devices use deposited films on glass substrates. This presents many challenges for MEMS, both as regards materials for micro-machined structures and...

In this paper, an Adaptive Neuro Fuzzy Inference System (ANFIS) based control is proposed for the tracking of a Micro-Electro Mechanical Systems (MEMS) gyroscope sensor. The ANFIS is used to train parameters of the controller for tracking a desired trajectory. Numerical simulations for a MEMS gyroscope are looked into to check the effectiveness of the ANFIS control scheme. It proves that the sy...

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena appear and interact. Because of their microscopic scale, strong coupling effects arise between the different physical fields, and some forces, which were negli...